| 申请人 |
SEMICONDUCTOR PROCESS LABORATORY, CO. LTD., TOKIO/TOKYO, JP;ALCAN- TECH CO. INC., TOKIO/TOKYO, JP;CANON SALES CO. INC., TOKIO/TOKYO, JP |
发明人 |
MAEDA, KAZUO, C/O SEMICOND. PROCESS LAB.CO.LTD, TOKYO, JP;OHIRA, KOUICHI, C/O SEMICOND. PROCESS LAB.CO.LTD, TOKYO, JP;CHINO, HIROSHI, C/O SEMICOND. PROCESS LAB.CO.LTD, TOKYO, JP |
