| 摘要 |
A laser beam measurement device comprises a pinhole aperture (36) spaced to one side of a power meter (34) for measuring the power level of the laser beam. The positioning system (6) of the laser system (4) causes the laser beam to move relative to the pinhole aperture (36) in each of the three x, y, and z directions of an xyz coordinate system, namely longitudinally, transversely and radially relative to the pinhole aperture (36), respectively. During each scan, the power meter (34) measures the Gaussian distribution of the power level that occurs when the laser beam passes through the pinhole aperture (36) and moves relative thereto along the scan axis. The coordinate position of the laser beam along each scan axis is identified corresponding to a peak value of the Gaussian distribution, thus deriving a three-dimensional reference location corresponding to the point in space at which the focal point of the laser beam is centered on the pinhole aperture (36). |
