Apparatus for testing semiconductor laser devices

摘要

An apparatus for testing individual ones of semiconductor laser devices of a laser bar during a manufacturing thereof comprises a laser bar chuck for securing the laser bar in a first manner and orientation. A probe is used for probing a laser device of the laser bar. A translational manipulator receives the laser bar chuck and the probe in a second and third manner and orientation, respectively, the manipulator further for translationally positioning the laser bar chuck and the probe independently in a fourth and fifth controlled manner. An energizing means energizes the probe in a sixth controlled manner. A detector detects a lasing of a probed laser device and provides a characteristic output signal representative of a testing characteristic of the probed laser device. Lastly, a controller controls the manipulator and the energizing means in a prescribed manner: (i) in preparation for a testing of a desired one of the laser devices of the laser bar; (ii) during a testing of a desired one of the laser devices of the laser bar; and (iii) upon a completion of the testing of the desired one of the laser devices.