SIGNAL PROCESSING METHOD, REGULATING METHOD OF POSITION DETECTING OPTICAL SYSTEM, TARGET PATTERN AND METHOD AND APPARATUS FOR EXPOSING

摘要

PURPOSE: To provide a target pattern which can obtain a position detection signal of excellent contrast and symmetry. CONSTITUTION: A target pattern 1 detected by a position detecting optical system of the wavelengthλ, numerical aperture MA and partial coherence cr of an inspection light is formed of a repeating stepwise difference 1b of a dot or a line 1a of a protruding width W1 (<0.5λ(l+σ)/NA), a pitch P (<λ(1+σ/NA) disposed at the periphery, and a protruding width W2 (<0.5λ(1+σ)/NA). A target pattern 2 is formed of a repeating stepwise difference 2b of a dot or line 2a of a recess width W1 (<0.5λ(1+σ)/NA), a pitch P (<λ(1+σ)/NA), and a protruding width W2 (0.5λ(1+σ)/NA).