发明名称 |
CUTTING LIQUID, ITS MANUFACTURE AND CUTTING METHOD OF INGOT |
摘要 |
PURPOSE: To solve a risk of ignition at the time of making use of nonwater- soluble cutting oil and a problem of air polution by an organinc solvent by following a washing process of a material to be cut and reduce a warp of a sliced product at the time of cutting-off of an ingot such as a large-diameter silicon single crystal. CONSTITUTION: A uniform mixture with a fatty acid amine which is comprised by making organic and /or inorganic bentonite, water, an alkanolamine and a higher fatty acid react on each other is taken as a main component and the main component is made into a water-soluble cutting liquid by adding an auxiliary agent such as a water retention improver, a lowering agent of a friction coefficient, the auxiliary agent of rust preventive capacity, washing property improving auxiliary agent and a defoaming agent. |
申请公布号 |
JPH0857847(A) |
申请公布日期 |
1996.03.05 |
申请号 |
JP19940224237 |
申请日期 |
1994.08.25 |
申请人 |
SHIN ETSU HANDOTAI CO LTD;OOTOMO KAGAKU SANGYO KK;MIMASU HANDOTAI KOGYO KK |
发明人 |
KABURAGI SHINGO;ASHIDA AKIO;KIUCHI ETSUO;HAYAKAWA KAZUO;TOYAMA KOHEI |
分类号 |
B24B27/06;B28D5/04;C09K3/14;C10M109/02;C10M125/30;C10M133/06;C10M173/02;C10N40/22;C10N70/00;H01L21/304;(IPC1-7):B28D5/04 |
主分类号 |
B24B27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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