发明名称 |
Point-of-use ammonia purification for electronic component manufacture |
摘要 |
Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.
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申请公布号 |
US5496778(A) |
申请公布日期 |
1996.03.05 |
申请号 |
US19940179001 |
申请日期 |
1994.01.07 |
申请人 |
STARTEC VENTURES, INC. |
发明人 |
HOFFMAN, JOE G.;CLARK, R. SCOT |
分类号 |
C01B7/07;C01B7/19;C01C1/02;C01C1/16;H01L21/00;(IPC1-7):C01C1/00 |
主分类号 |
C01B7/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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