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发明名称
Photokathoden-Bildprojektionsapparat für die Mustergestaltung auf einer Halbleitervorrichtung.
摘要
申请公布号
DE68922929(T2)
申请公布日期
1996.02.22
申请号
DE19896022929T
申请日期
1989.03.22
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
YAMADA, AKIO, KAWASAKI-SHI KANAGAWA, 213, JP;SAKAMOTO, KIICHI, TOKYO, 170, JP;KUDOU, JINKO, KAWASAKI-SHI KANAGAWA, 214, JP;YASUDA, HIROSHI, YOKOHAMA-SHI KANAGAWA, 222, JP
分类号
G03F7/20;H01J37/317;(IPC1-7):H01J37/317;H01J37/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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