发明名称 Process for producing rods or blocks of semiconductor material and an apparatus for carrying out the process
摘要 The process includes processing a molten phase of semiconductor material covering a solid phase of the material and having a free surface opposite this solid phase, into which, during the crystallization procedure, energy is radiated and material is fed in in granular form, which material floats and is melted. As a result, at the opposite solid/liquid interface, material grows on the solid phase which is drawn downwards in accordance with the growth rate. The process allows mono- or polycrystalline rods or blocks to be obtained. The main advantages of the process are that it can be carried out without melting vessels, it is possible to use granular material, and the energy balance is favorable because of the small amounts of melt.
申请公布号 US5492079(A) 申请公布日期 1996.02.20
申请号 US19940270433 申请日期 1994.07.05
申请人 WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH 发明人 GEISSLER, JOACHIM;ANGRES, ULRICH
分类号 C30B15/00;C30B15/08;C30B15/14;C30B28/04;H01L21/208;(IPC1-7):C30B15/08 主分类号 C30B15/00
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