| 摘要 |
An energy-resolving x-ray detector for soft x-rays produced by elements having atomic numbers ranging from 9 to 23 includes a charge-coupled integrated circuit radiation detector device having an array of collection regions in a parallel plurality of collection shift registers forming columns of the array; an output amplifier for sequentially amplifying and signalling the charges received by the collection shift register; and a row shift register connected between the collection shift registers and the output amplifier; and a clock circuit having a multi-phase column output connected for sequentially shifting charges between collection regions of the collection shift register and into the row shift register during continuous exposure of the array to incoming radiation, each of the charges received by the output amplifier being sequentially accumulated in each of the collection regions of one collection shift register in response to the radiation, the clock circuit also having a multi-phase row output connected for sequentially shifting the charges from the row shift register to the output amplifier, the output amplifier having a reset connection to the clock circuit for momentarily resetting the input to the output amplifier at a predetermined level prior to receipt of each of the charges into the output amplifier. The output amplifier feeds an analog signal chain providing correlated double sampling. A spectrometer and thickness measurement apparatus suitable for monitoring silicone coatings includes the detector.
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