THIN FILM TRANSISTOR AND ITS MANUFACTURE AND LIQUID CRYSTAL DISPLAY USING IT

摘要

PURPOSE:To provide a thin film transistor which can reduce the leakage without complicating the process. CONSTITUTION:A thin film transistor is one where a channel part 11 and source and drain regions 12 and 13 are made in the semiconductor film 2 made on a substrate 1, and a gate electrode 4 is made through an insulating film 15 on the channel part 11, and resistance layers 14 and 14 for control of transistor property are provided between the channel region 11 and the source and drain regions 12 and 13.