| 摘要 |
<p>PURPOSE:To form a homogeneous cold cathode on a substrate by etching. CONSTITUTION:A plurality of divided metallic layers 35 (aluminum) are made on a substrate. Each divided metallic layer 35 is isolated by a groove G. The groove G has a width enough for functioning as a passage for etchant. Resist layers 32 having circular patterns about 5mum in diameter are made at pitches of 10mum vertically and horizontally. The whole of the substrate is soaked in etchant to perform wet etching. The divided metallic layer 35 consisting of aluminum is removed by etching, but only the section right below each resist layer 32 remains as a conical cold cathode. Since the groove G is made, etchant convects all over the substrate, and roughly homogeneous etching is performed as a whole.</p> |
