| 摘要 |
PCT No. PCT/DE93/00172 Sec. 371 Date Aug. 29, 1994 Sec. 102(e) Date Aug. 29, 1994 PCT Filed Mar. 1, 1993 PCT Pub. No. WO93/17311 PCT Pub. Date Sep. 2, 1993.Subject of the invention is a shearing measurement head, which has a very compact structure by the use of concave mirrors in a Michelson interferometer arrangement, allows phase-shifting and can be operated optionally using an attached objective.
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