| 摘要 |
PURPOSE: To obtain a large gas flow rate through a laser by providing a bypass and allowing one portion of a laser gas that is carried by a fan to bypass a discharge room by the bypass. CONSTITUTION: A bypass 8 is connected to a laser gas circuit 5. A discharge side 9 of a fan 4 is connected to a suction side 10 via the bypass 8, thus enabling one portion of a laser gas 6 to pass through the bypass 8 near a discharge room 2 and reach the suction side 10 of the fan 4 and hence the fan 4 to carry much flow. Further, a control device is connected to a flow resistance 11 and a measuring device 14. The flow rate of a laser gas flow 15 through the bypass 8 can be controlled to a desired value via a control device 16, thus operating the fan 4 at an optimum operation point. |
