ELECTRON EMISSION SOURCE AND IMAGE FORMING DEVICE USING THIS SOURCE, AND MANUFACTURE OF THE SOURCE AND DEVICE

摘要

PURPOSE:To reduce the dispersion of characteristics between each element, regarding an electron source equipped with many surface conductive electron emission elements. CONSTITUTION:A batch forming process is applied to element rows formed on a substrate out of a plurality of wired elements, and an electron emission section 2 is thereby formed on the conductive thin film 3 of each element. At the time of forming the section 2, temperature distribution is generated on substrate surface, so that voltage or electric power applied to each element immediately before forming becomes approximately equal, and the resistance of each element prior to forming is thereby controlled.