ELECTRON EMISSION ELEMENT, ELECTRON SOURCE AND IMAGE FORMING DEVICE USING THIS SOURCE AND THEIR MANUFACTURE

摘要

PURPOSE:To provide a method for the manufacture of an electron emission element used as an electron source for an image forming device or the like, and stably driven over a long period. CONSTITUTION:Regarding the manufacture of a surface conductive electron emission element having a conductive thin film 3 between element electrodes 4 and 5, the element laid in a vacuum device is subjected to a vacuum exhaust process, while ultraviolet is being irradiated. As a result, a residual organic component attracted to an element surface can be removed and discharged without heating the element to high temperature. A danger of generating an element defect can be thus avoided.