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发明名称
FORMATION OF METAL WIRING
摘要
申请公布号
JPH0837235(A)
申请公布日期
1996.02.06
申请号
JP19940192057
申请日期
1994.07.22
申请人
NIPPON STEEL CORP
发明人
IIJIMA MITSUTERU
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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