JIG FOR PROCESSING SEMICONDUCTOR

摘要

PURPOSE:To prevent wafers from being contaminated by drops of liquid, which may be formed when the wafers are taken out of a cleaning bath at the end of a wafer cleaning process in semiconductor device processing. CONSTITUTION:A jig for processing semiconductor wafers 6 consists of a wafer holding section 4 that includes at least opposed walls; and a handle 2 having hooks 5 that are fit onto the walls of the holding section 4. The handle has no projection facing in the direction of wafers in its portion to be positioned above the wafers. Since there is no projection on the handle on the wafer holding section side, liquid will not run along such a projection to drop on the semiconductor wafers even if the handle is soaked with the liquid. This makes it possible to prevent semiconductor wafers from being contaminated.