摘要 |
PURPOSE:To provide a semiconductor vibration gyro which is easy to assemble, compact, inexpensive and fit for mass production, having a high detecting accuracy, a high sensitivity and a high stability. CONSTITUTION:At a piezoelectric body 3, a semiconductor substrate is etched on a stage 5, whereby a thin film is formed on a surface of a vibrator 2 which has one end opened and the other end fixed and united with a supporting body 1. When a voltage is impressed to the piezoelectric body 3, the vibrator 2 is oscillated. An amplitude is detected by arm electrode 7 and a Coriolis force is detected by electrodes 4a and 4b. An AGC circuit is constituted of an AC power source 8, an amplitude modulation circuit 9 and an amplitude detection circuit 10. |