发明名称 SEMICONDUCTOR VIBRATION GYRO
摘要 PURPOSE:To provide a semiconductor vibration gyro which is easy to assemble, compact, inexpensive and fit for mass production, having a high detecting accuracy, a high sensitivity and a high stability. CONSTITUTION:At a piezoelectric body 3, a semiconductor substrate is etched on a stage 5, whereby a thin film is formed on a surface of a vibrator 2 which has one end opened and the other end fixed and united with a supporting body 1. When a voltage is impressed to the piezoelectric body 3, the vibrator 2 is oscillated. An amplitude is detected by arm electrode 7 and a Coriolis force is detected by electrodes 4a and 4b. An AGC circuit is constituted of an AC power source 8, an amplitude modulation circuit 9 and an amplitude detection circuit 10.
申请公布号 JPH0829178(A) 申请公布日期 1996.02.02
申请号 JP19940162250 申请日期 1994.07.14
申请人 NISSAN MOTOR CO LTD 发明人 HANAMURA AKIHIRO;MIHARA TERUYOSHI;KITA TORU
分类号 G01P9/04;G01C19/56 主分类号 G01P9/04
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