| 摘要 |
PURPOSE:To provide a sensor detecting the temp. change of an object to be inspected in the vicinity of the irradiated surface of the object to be inspected irradiated with electromagnetic radiation to measure the effect of the electromagnetic radiation on the object to be inspected. CONSTITUTION:The sensor is equipped with a light source 3 emitting electromagnetic radiation, a propagation means 2 propagating the electromagnetic radiation from the light source 3 and a plane temp. detector 1 having a light transmitting hole 4 for irradiating an object to be inspected with electromagnetic radiation. The effect due to the electromagnetic radiation emitted through the light transmitting hole 4 is measured by the plane temp. detector 1. |
