| 摘要 |
PURPOSE:To efficiently form the fine pattern, which has the fine line width and the appropriate film thickness, at a high accuracy by providing a fine pattern forming original plate with a substrate, which has the conductive surface, and a masking layer made of the insulating material provided in recessed parts, which are formed with the predetermined pattern on the surface of the substrate. CONSTITUTION:A substrate 2 is formed with a photo resist layer 6 with the predetermined pattern. Etching is performed to the substrate 2 so as to form recessed parts 3, and the whole surface of the substrate 2 is coated with the coating liquid of the insulating material so as to form an insulating film 7. Thereafter, the photo resist layer 6 is removed, and simultaneously, the insulating layer 7 formed on the photo resist layer 6 is removed by lift-off so as to expose conductive parts of the substrate 2. The insulating layer 7 is left in the only recessed parts 3 on the substrate 2, and this insulating film 7 is hardened so as to form a masking layer 4. After forming a plating layer 5 on the conductive part of this fine pattern forming original plate 1, a work piece 8 provided with an adhesive layer 9 and the plating layer 5 are adhered to each other, and the fine pattern is transferred onto the work piece 8 so as to form the fine pattern. |
