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发明名称
EQUIPMENT AND METHOD FOR CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
JPH0831744(A)
申请公布日期
1996.02.02
申请号
JP19940159819
申请日期
1994.07.12
申请人
FUJITSU LTD
发明人
TSUMOTO ISAO
分类号
C30B25/12;C23C14/50;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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