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发明名称
摘要
申请公布号
JPH0810694(B2)
申请公布日期
1996.01.31
申请号
JP19860235369
申请日期
1986.10.02
申请人
发明人
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
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代理人
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地址
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