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发明名称
PRODUCTION OF THIN FILM CRYSTAL OF COMPOUND SEMICONDUCTOR AND DEVICE THEREFOR
摘要
申请公布号
JPH0826885(A)
申请公布日期
1996.01.30
申请号
JP19940155881
申请日期
1994.07.07
申请人
MITSUBISHI HEAVY IND LTD
发明人
YONEKURA YOSHIMICHI
分类号
C30B19/10;C30B29/48;H01L21/208;(IPC1-7):C30B19/10
主分类号
C30B19/10
代理机构
代理人
主权项
地址
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