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经营范围
发明名称
FORMING METHOD OF INORGANIC RESIST FILM
摘要
申请公布号
JPH0815868(A)
申请公布日期
1996.01.19
申请号
JP19940144274
申请日期
1994.06.27
申请人
NEC CORP
发明人
FUJITA JUNICHI
分类号
G03F7/004;C01F11/22;G03F7/11;G03F7/26;(IPC1-7):G03F7/26
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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