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发明名称
PRESSURE CONTROLLER
摘要
申请公布号
JPH0817794(A)
申请公布日期
1996.01.19
申请号
JP19940150730
申请日期
1994.07.01
申请人
HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD
发明人
NARITA HIDEMI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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