CHARGED PARTICLE BEAM DEVICE,申请号JP19940150810-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH0817383(A)	申请公布日期	1996.01.19
申请号	JP19940150810	申请日期	1994.07.01
申请人	JEOL LTD	发明人	MIYAO HIROFUMI;ISHIKAWA TOYOJI
分类号	H01J37/20;(IPC1-7):H01J37/20	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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