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经营范围
发明名称
HEATER
摘要
申请公布号
JPH0817745(A)
申请公布日期
1996.01.19
申请号
JP19940149053
申请日期
1994.06.30
申请人
TOSHIBA MACH CO LTD
发明人
SHIMADA MASAYUKI;HONDA YASUAKI;MITANI SHINICHI
分类号
H05B3/00;C23C16/46;H01L21/205;H05B3/14;(IPC1-7):H01L21/205
主分类号
H05B3/00
代理机构
代理人
主权项
地址
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