| 摘要 |
<p>PURPOSE:To predict the occurrence of abnormality in a device and products manufactured by the device by estimating the variation of data for a certain management item. CONSTITUTION:A data detecting part 10 in a control part A enters numerical data for a management item from respective measuring instruments C, D and records the data in a data recording file (a) in a secondary storage device B. A management reference comparing part 20 compares the numerical data with the data of a management reference data file (b) in the device B, and when numerical data other than the management reference exist, outputs a signal indicating the existence to an warning judging part 40. The judging part 40 judges 'warning' at the time of receiving the signal from the comparing part 20, and when the signal is not received, compares graphic data with data from an warning data history file (e) and judges the necessity of warning.</p> |
