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发明名称
SEMICONDUCTOR ACCELERATION SENSOR
摘要
申请公布号
JPH0815295(A)
申请公布日期
1996.01.19
申请号
JP19940151324
申请日期
1994.07.01
申请人
SEIKO INSTR INC
发明人
FURUTA KAZUYOSHI
分类号
G01P5/12;H01L29/84;(IPC1-7):G01P5/12
主分类号
G01P5/12
代理机构
代理人
主权项
地址
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