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经营范围
发明名称
SEMICONDUCTOR CLEANING EQUIPMENT
摘要
申请公布号
JPH0817891(A)
申请公布日期
1996.01.19
申请号
JP19940144324
申请日期
1994.06.27
申请人
HITACHI LTD
发明人
IWASAKI TAKEMASA
分类号
H01L21/677;H01L21/027;H01L21/304;H01L21/306;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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