发明名称 |
Dual-modulation interferometric ellipsometer |
摘要 |
The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).
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申请公布号 |
US5485271(A) |
申请公布日期 |
1996.01.16 |
申请号 |
US19950418162 |
申请日期 |
1995.04.06 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
DREVILLON, BERNARD;BIOSCA, ADOLFO C. |
分类号 |
G01J4/04;G01N21/21;(IPC1-7):G01B9/02 |
主分类号 |
G01J4/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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