VERFAHREN ZUR LITHOGRAPHISCHEN HERSTELLUNG VON GALVANISCH ABFORMBAREN MIKROSTRUKTUREN MIT DREIECKIGEM ODER TRAPEZFÖRMIGEM QUERSCHNITT,申请号AT19890119818T-传众专利搜索

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发明名称	VERFAHREN ZUR LITHOGRAPHISCHEN HERSTELLUNG VON GALVANISCH ABFORMBAREN MIKROSTRUKTUREN MIT DREIECKIGEM ODER TRAPEZFÖRMIGEM QUERSCHNITT
摘要
申请公布号	AT132279(T)	申请公布日期	1996.01.15
申请号	AT19890119818T	申请日期	1989.10.25
申请人	FORSCHUNGSZENTRUM KARLSRUHE GMBH	发明人	MANER, ASIM, DR.;MOHR, JUERGEN, DR.
分类号	B81C1/00;C25D1/00;C25D1/10;C25D5/02;G03F7/00;G03F7/12;G03F7/20;(IPC1-7):G03F7/20	主分类号	B81C1/00
代理机构		代理人
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