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经营范围
发明名称
FORMATION OF METAL THIN FILM
摘要
申请公布号
JPH088254(A)
申请公布日期
1996.01.12
申请号
JP19940138836
申请日期
1994.06.21
申请人
NEC CORP
发明人
OCHIAI YUKINORI
分类号
H01L21/3205;H01L21/263;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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