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经营范围
发明名称
PLASMA CVD APPARATUS
摘要
申请公布号
JPH088190(A)
申请公布日期
1996.01.12
申请号
JP19940133494
申请日期
1994.06.16
申请人
NEC YAMAGATA LTD
发明人
SHIRAHATA KAZUHIRO
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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