摘要 |
PURPOSE: To provide a pressure transducer having electric connecting configuration, in which a diaphragm and base member are formed from a powder in respective dies through a press working. CONSTITUTION: A pressure transducer consists of a body in single-piece structure made of a ceramic material, and the body is provided with a void near the outer surface 16. The material for it is an atomizing dry powder for press working, which is shaped into an approx. cylindrical diaphragm 22 and base member 24 through press working, when a recess 26 is formed at one end face of the base member 24. An electrode pattern is attached to the bottom surface of the diaphragm 22 and the top surface of the base member 24. The base member 24 is equipped with a bottom plate 20 in the center of the recess 26, and from this bottom plate 20, a path 20a extends outwardly in the radial direction, along the inclining side wall 28 to reach a joint pad 20b. A terminal pad 20c is provided having a periphery approx. identical to the periphery of the joint pad 20b and is attached to a position on the diaphragm occupying a concentrical position with the pad 20b, when the diaphragm 22 is jointed on the base member 24. |