Ladungsschleuse und Wafertransportsysteme.,申请号DE1992606295-传众专利搜索

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发明名称	Ladungsschleuse und Wafertransportsysteme.
摘要
申请公布号	DE69206295(D1)	申请公布日期	1996.01.11
申请号	DE1992606295	申请日期	1992.03.26
申请人	TOKYO ELECTRON LTD., TOKIO/TOKYO, JP	发明人	OOSAWA, TETSU, C/O OPERATIONAL HEAD OFFICE, 2-30-7 SUMIYOSHI-CHO, FUCHU TOKYO 183, JP;ASAKAWA, TERUO, C/O OPERATIONAL HEAD OFFICE, 2-30-7 SUMIYOSHI-CHO, FUCHU TOKYO 183, JP;NEBUKA, KENJI, C/O OPERATIONAL HEAD OFFICE, 2-30-7 SUMIYOSHI-CHO, FUCHU TOKYO 183, JP;ONO, HIROO, C/O OPERATIONAL HEAD OFFICE, 2-30-7 SUMIYOSHI-CHO, FUCHU TOKYO 183, JP
分类号	B65G47/80;H01L21/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/00	主分类号	B65G47/80
代理机构		代理人
主权项
地址

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