| 摘要 |
PURPOSE:To increase the treating amount of NF3 per unit weight of an exhaust gas treatment by bringing a treating agent containing an oxide and/or metal with specified ratio of chrome to iron as effective components with exhaust gas containing nitrogen trifluoride. CONSTITUTION:An exhaust gas treatment agent containing an oxide with the ratio of 1-30wt.% of chrome to iron or/and a metal as effective components is prepared. The exhaust gas treatment agent thus prepared is filled in a column usually, and brought into contact with exhaust gas containing NF3 to carry out an aimed exhaust treatment. At that time, in the case of exhaust gas treatment in which metal is a main body as a chemical type in the treatment agent, the exhaust gas treatment agent is brought into contact with gas at comparatively low temperature, while in the case of exhaust gas treatment in which oxide is a main body in the treatment agent, the agent is brought into contact with exhaust gas at comparatively high temperature. To be concrete, the temperature range is generally 50-600 deg.C. As a result, the problem that the treatable amount of NF3 per unit weight of the treatment agent is far less than the theoritical treatment capability is improved. |
