发明名称 |
Multiple target laser ablation system |
摘要 |
A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film.
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申请公布号 |
US5483037(A) |
申请公布日期 |
1996.01.09 |
申请号 |
US19930159614 |
申请日期 |
1993.12.01 |
申请人 |
MARTIN MARIETTA ENERGY SYSTEMS, INC. |
发明人 |
MASHBURN, DOUGLAS N. |
分类号 |
C23C14/28;C23C14/54;(IPC1-7):B23K26/00;B23K26/12 |
主分类号 |
C23C14/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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