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发明名称
PHOTOSENSITIVE COMPOSITION
摘要
申请公布号
JPH07333850(A)
申请公布日期
1995.12.22
申请号
JP19940156675
申请日期
1994.06.14
申请人
SONY CORP
发明人
SAITO MASAO
分类号
G03F7/039;G03F7/004;G03F7/029;G03F7/038;H01L21/027;(IPC1-7):G03F7/038
主分类号
G03F7/039
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代理人
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