| 摘要 |
PURPOSE:To roughly position a substrate to a prescribed position without breaking the substrate nor producing dust. CONSTITUTION:The relative positional relation between a substrate 2 and a carrying arm 3 which takes out a substrate from a housing case 1 is adjusted to a prescribed relation by correcting the position of the case 1 while the substrate 2 is relatively kept standstill against the case 1. Therefore, the possibility of giving damage to the substrate 2 and generating dust due to friction when the substrate 2 is moved can be eliminated in the course of rough positioning of the substrate 2. |
