| 摘要 |
PURPOSE:To enhance the operability of the taking-in-and-out operation of a wafer to and from a wafer holder when respectively different pattern layers are formed on both faces of the wafer. CONSTITUTION:A mask sheet 3 for one face is fixed to a first wafer holder 1 and a mask sheet 3 for the other face is fixed to a second wafer holder 2 by means of respective screwes 12b. In a state that a wafer 120 and a weight 4 are mounted on the first wafer holder 1, a film is formed, and the weight 4 is removed. Then, the first wafer holder 1 and the second wafer holder 2 are overlapped, and the wafer 120 is transferred directly to the second wafer holder 2 from the wafer holder 1. |
