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发明名称
CHEMICAL VAPOR GROWTH DEVICE AND RETENTION TOOL
摘要
申请公布号
JPH07335555(A)
申请公布日期
1995.12.22
申请号
JP19940123635
申请日期
1994.06.06
申请人
HITACHI LTD
发明人
HAGIMOTO NAOHIRO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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