Silicon substrate based force or acceleration sensor

摘要

The force/acceleration sensor includes of a multi-layered substrate (1) with an upper silicon layer (2) from which a movable element (10,11,12) is structured. The upper layer is insulated from the underlying layers (4). Insulation trenches (15) on the upper layer are bridged by electrical leads (16) fastened to electrodes (11,14). In the presence of force or acceleration, the ductile springs (12) connected to the seismic mass (10) to which the movable electrodes (1) are joined, sense the change in distance between the movable (11) and static (14) electrodes.