发明名称 |
RESISTER MEASURING METHOD |
摘要 |
The method for measuring specific resistance of super pure water comprises the steps of: placing an internal cylinder at the center of an external cylinder which has a plurality of holes to be rotatable; rotating the internal cylinder to form a turbulent region at the surface of the internal cylinder; and forming a constant pattern of current which is not affected by the current speed of the super pure water at the turbulent region to measure the specific resistance.
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申请公布号 |
KR950014749(B1) |
申请公布日期 |
1995.12.14 |
申请号 |
KR19950031658 |
申请日期 |
1995.09.25 |
申请人 |
LG SEMICONDUCTOR CO., LTD. |
发明人 |
KIM, JAE - JUNG |
分类号 |
G01R27/00;(IPC1-7):G01R27/00 |
主分类号 |
G01R27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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