发明名称 RESISTER MEASURING METHOD
摘要 The method for measuring specific resistance of super pure water comprises the steps of: placing an internal cylinder at the center of an external cylinder which has a plurality of holes to be rotatable; rotating the internal cylinder to form a turbulent region at the surface of the internal cylinder; and forming a constant pattern of current which is not affected by the current speed of the super pure water at the turbulent region to measure the specific resistance.
申请公布号 KR950014749(B1) 申请公布日期 1995.12.14
申请号 KR19950031658 申请日期 1995.09.25
申请人 LG SEMICONDUCTOR CO., LTD. 发明人 KIM, JAE - JUNG
分类号 G01R27/00;(IPC1-7):G01R27/00 主分类号 G01R27/00
代理机构 代理人
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