Snap action carrier for cathodic vacuum sputtering plant

摘要

The substrate carrier plate (17) engages in one or more locations through recesses (24, 25) onto centering pegs (22, 23) projecting out of the plane of the carrier (10) and in at least one further location by means of a clamp (18) pressing it against the carrier (19). The clamp (18) moves between its clamping and released positions on the base (2) when the operating link (11) is moved by the lever (21). The clamping rollers (14) run through holes (20) in the carrier plate (17) on the ramps (15) behind which the rollers come to the release position. Moving along these ramps away from the hole, the roller moves away from the carrier (19).