| 摘要 |
PURPOSE:To provide a process for producing an optical waveguide capable of shortening treatment time in a method for utilizing a local refractive index change by photoirradiation. CONSTITUTION:This process has a step forgaseous hydrogen into a vessel 3 in which a glass substrate 6 is arranged, a step for generating thermion by energizing a filament 4 for releasing electrons disposed in this vessel 3, a step for voltage on an electrode 5 disposed in the vessel 3 and withdrawing the generated thermion, a step for exciting the gaseous hydrogen filled in the vessel 3 by transfer of thermion to atomic hydrogen, a step for permeating the atomic hydrogen into the glass substrate 6 and a step for irradiating the glass substrate permeated with the atomic hydrogen with light via a desired mask to locally change the refractive index of the part irradiated with the light. |
