| 摘要 |
PURPOSE:To perform acceleration detection with high accuracy by detecting horizontal displacement of a mass part and eliminating detection errors of the acceleration caused by the displacement. CONSTITUTION:Fixed parts 13, 13 and a movable part 14 formed of a single crystal of low resistance are formed on a glass board 12. Since a mass part 17 of the movable part 14 is supported by a beam, it positions on a recess part 12A, and is movable in the direction of an arrow A. An auxiliary electrode 18 opposed to another auxiliary electrode of the movable side 17B is formed on the recess part 12A. And change of a separated distance dB between the auxiliary electrode of the movable side 17B and the auxiliary electrode 18 is detected as an electrostatic capacity, horizontal displacement of the mass part 17 is found out, and vertical displacement of the mass part 17 is corrected. Thereby acceleration detection of the arrow A is performed precisely. |
