| 摘要 |
PURPOSE:To perform projection alignment with excellent optical performance without deteriorating throughput even when an exposure area is large. CONSTITUTION:An aligner which aligns the image of a mask 10 on a plate 30 by projection while moving the mask 10 and the plate 30 is permitted to form the unmagnified erected image of the mask on the plate, and is provided with a first projection optical system 35a and a second projection optical system which are the telecentric systems on the both sides. The first and the second projection optical systems are provided with dioptric systems G1 and G2 for positive refraction and flat plane reflecting planes M1 and M1 which reflect beams from the dioptric systems again to the dioptric systems. |
