| 摘要 |
PURPOSE:To obtain an excimer laser in which halogen gas can be injected at an arbitrary timing by calculating the total supply quantity of halogen gas based on the count of pulses and the quantity of halogen gas being consumed for one time oscillation pulse. CONSTITUTION:Upon receiving an N-th execution command, an operating unit 10 fetches the count of pulses C(n) from a counter 7 and stores the count C(n) in a memory 8. Upon receiving an (N-1)th command for executing injection of halogen gas from an execution command section 9, the difference P(n) between C(n) and C(n-1) is calculated. Furthermore, the quantity (k) of halogen gas being consumed for one time oscillation pulse is read out from the memory 8 and multiplied by P(n) to calculate the quantity H of halogen gas consumed through laser oscillation between reception of (N-1) th and N-th execution commands thus feeding the required gas at an arbitrary timing from the gas supply section 5. |
