| 摘要 |
<p>PURPOSE:To provide a teaching system for teaching automatic setting of key pattern which enables automatic theta alignment, magnification setting, conversion to CH2, etc., when dicing a semiconductor wafer. CONSTITUTION:The title system is constituted of a street cross designation step wherein a surface of a semiconductor wafer is imaged by an optical means and an operator designates street cross, a key pattern automatic extruding step wherein a proper pattern is automatically extruded as a key pattern from a surface of a semiconductor wafer and an operator call step for letting an operator know that an operation is finished after a key pattern is extruded.</p> |
